Semiconductor · Microelectronics
Integrated circuit industry water reuse equipment, semiconductor chip water reuse, wastewater recovery
一. 設備簡介
1、 Equipment introduction
國內半導體行業近幾年來的發展令人注目,特別是大型芯片制造企業在東南沿海地區蓬勃發展。芯片制造過程中要消耗大量的水,同時使用大量的化學試劑和特殊氣體,排放的廢水中成分復雜,因此如何選擇廢水處理系統,使廢水處理達標,并降低其處理費用,同時充分做好中水回用,降低單位產品的能耗,節約水資源,是我們的研究重點。
The development of domestic semiconductor industry in recent years has attracted great attention, especially the large-scale chip manufacturing enterprises in southeast coastal areas. In the process of chip manufacturing, a large amount of water is consumed, and a large number of chemical reagents and special gases are used. The composition of the discharged wastewater is complex. Therefore, how to select wastewater treatment system to make the wastewater treatment meet the standard and reduce its treatment cost, and to fully reuse water, reduce the energy consumption of unit products and save water resources are our research focus.
宏潔水務的中水回用設備工藝已采用膜處理技術,包括預處理、超濾系統和反滲透(RO)系統及EDI系統(可選)幾部分。由于廢水通過現代技術的深度處理能夠達到生產用水標準或者生活雜用水標準,使廢水能夠循環使用,這樣企業對于廢水這一塊的整體運行費用得到大|大的降低,對環境保護起到很大的作用。
The water reuse equipment technology of macro clean water has adopted membrane treatment technology, including pretreatment, ultrafiltration system, RO system and EDI system (optional). Because the wastewater can meet the production water standard or the standard of domestic miscellaneous water through the advanced treatment of modern technology, the wastewater can be recycled. Therefore, the enterprise can greatly reduce the overall operation cost of the waste water, which plays a great role in environmental protection.
二. 設計標準及依據
2、 Design standard and basis
1. 根據用戶提供的詳細水質報告“量身定制”。
1. According to the detailed water quality report provided by the user, "customized".
2. 水處理設備技術條件《JB/T 2932-1999》
2. Technical conditions of water treatment equipment JB / T 2932-1999
3. 用于一般景觀生態用水符合(CJ/T95-2000),
3. the water used for general landscape ecology meets the requirements (cj/t95-2000),
4. 用于生活雜用水應符合建設部(CJ/48-1999),
4. the water used for domestic miscellaneous water shall conform to the Ministry of construction (cj/48-1999),
5. 用于工業循環冷卻水應符合(GB/T50102-2003).
5. the cooling water used for industrial circulation shall conform to gb/t50102-2003
6. 反滲透水處理設備標準《CJ/T119-2000》
6. standard for reverse osmosis water treatment equipment cj/t119-2000
7. 低壓開關設備和控制設備成套裝置《IEC439-1 》
7. complete set of low voltage switchgear and control equipment iec439-1
三. 工藝流程
3、 Process flow
四. 設計特點
4、 Design features
1. 系統采用全自動控制(同時亦可采用手動控制),系統運行時可設定自動反洗、再生程序;
1. The system adopts full automatic control (manual control is also available), and automatic backwashing and regeneration procedures can be set during system operation;
2. 管道一般采用UPVC材質;
2. UPVC is generally used for the pipeline;
3. 集成控制系統和集成儀表系統等,方便操作管理;
3. integrated control system and integrated instrument system, etc., which is convenient for operation and management;
4. 設備具有耗材更換自動提示功能,并且耗材的更換周期取決于水質和壓力的變化,而非根據耗材的使用時間,考慮到了各地水質的差異,設計更;
4. the equipment has the function of automatic prompt for consumables replacement, and the replacement cycle of consumables depends on the change of water quality and pressure, rather than considering the difference of water quality in different places according to the usage time of consumables, the design is more important;
5. 能有效地進行固液分離,將廢水中的懸浮物質、膠體物質、生物單元流失的微生物菌群與已凈化的水分開。分離工藝簡單,占地面積小,出水水質好,一般不須經三級處理即可回用。
5. it can effectively separate the suspended substances, colloidal substances and microbial flora lost by biological units from purified water. The separation process is simple, the floor area is small, the effluent quality is good, and it can be reused without three-stage treatment.
6. 可使生物處理單元內生物量維持在高濃度,使容積負荷大|大提高,使處理單元水力停留時間大|大的縮短,生物反應器的占地面積相應減少。
6. the biomass in the biological treatment unit can be maintained at high concentration, the volume load is greatly increased, the hydraulic retention time of the treatment unit is greatly shortened, and the occupied area of the bioreactor will be reduced accordingly.
7. 由于可防止各種微生物菌群的流失,有利于生長速度緩慢的(硝化等)的生長,從而使系統中各種代謝過程順利進行。
7. it can prevent the loss of various microbial groups, and it is conducive to the slow growth (nitrification, etc.) growth, so that the metabolism process in the system can be smoothly carried out.
8. 使一些大分子難降解物的停留時間變長,有利于它們的分解。
8. it is beneficial to the decomposition of some macromolecular refractory compounds by making their residence time longer.
9. 膜處理技術與其它的過濾分離技術一樣,在長期的運轉過程中,膜作為一種過濾介質堵塞,膜的通過水量運轉時間而逐漸下降有效的反沖洗和化學清洗可減緩膜通量的下降,維持MBR系統的有效使用壽命。
9. membrane treatment technology is similar to other filtration separation technologies. In the long-term operation, the membrane is blocked as a filter medium. The effective backwashing and chemical cleaning can slow down the decline of membrane flux and maintain the effective service life of MBR system.